2/5/10	12:00:16 AM	Recipe started at 12:00 AM
2/5/10	12:00:16 AM	H2 valve closed
2/5/10	12:00:16 AM	BCl3 valve closed
2/5/10	12:00:16 AM	PH3 valve closed
2/5/10	12:00:16 AM	SiCl4 post valve closed
2/5/10	12:00:16 AM	Main Vac valve closed
2/5/10	12:00:16 AM	Bypass valve closed
2/5/10	12:00:16 AM	Bubbler valve closed
2/5/10	12:00:16 AM	Helium valve opened
2/5/10	12:00:16 AM	SiCl4 pre valve opened
2/5/10	12:00:16 AM	Helium MFC set to  0.000000
2/5/10	12:00:16 AM	H2 MFC set to  0.000000
2/5/10	12:00:16 AM	BCl3 MFC set to  0.000000
2/5/10	12:00:16 AM	PHl3 MFC set to  0.000000
2/5/10	12:00:16 AM	SiCl4 MFC set to  0.000000
2/5/10	12:00:16 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:00:16 AM	Tube furnace set to 0
2/5/10	12:00:16 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:01:59 AM	Program started after a nonstandard shutdown
2/5/10	12:02:00 AM	Program exited cleanly
2/5/10	12:02:03 AM	Program started normally
2/5/10	12:02:18 AM	Recipe started at 12:02 AM
2/5/10	12:02:18 AM	Helium valve closed
2/5/10	12:02:18 AM	H2 valve closed
2/5/10	12:02:18 AM	BCl3 valve closed
2/5/10	12:02:18 AM	PH3 valve closed
2/5/10	12:02:18 AM	SiCl4 pre valve closed
2/5/10	12:02:18 AM	SiCl4 post valve closed
2/5/10	12:02:18 AM	Main Vac valve closed
2/5/10	12:02:18 AM	Bypass valve closed
2/5/10	12:02:18 AM	Bubbler valve closed
2/5/10	12:02:18 AM	Helium MFC set to  0.000000
2/5/10	12:02:18 AM	H2 MFC set to  0.000000
2/5/10	12:02:18 AM	BCl3 MFC set to  0.000000
2/5/10	12:02:18 AM	PHl3 MFC set to  0.000000
2/5/10	12:02:18 AM	SiCl4 MFC set to  0.000000
2/5/10	12:02:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:02:18 AM	Tube furnace set to 0
2/5/10	12:02:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:02:18 AM	Helium valve closed
2/5/10	12:02:18 AM	H2 valve closed
2/5/10	12:02:18 AM	BCl3 valve closed
2/5/10	12:02:18 AM	PH3 valve closed
2/5/10	12:02:18 AM	SiCl4 pre valve closed
2/5/10	12:02:18 AM	SiCl4 post valve closed
2/5/10	12:02:18 AM	Main Vac valve closed
2/5/10	12:02:18 AM	Bypass valve closed
2/5/10	12:02:18 AM	Bubbler valve closed
2/5/10	12:02:18 AM	Helium MFC set to  0.000000
2/5/10	12:02:18 AM	H2 MFC set to  0.000000
2/5/10	12:02:18 AM	BCl3 MFC set to  0.000000
2/5/10	12:02:18 AM	PHl3 MFC set to  0.000000
2/5/10	12:02:18 AM	SiCl4 MFC set to  0.000000
2/5/10	12:02:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:02:18 AM	Tube furnace set to 0
2/5/10	12:02:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:02:18 AM	Run finished at 12:02 AM
2/5/10	12:02:24 AM	Program exited cleanly
2/5/10	12:04:21 AM	Program started normally
2/5/10	12:04:29 AM	Recipe started at 12:04 AM
2/5/10	12:04:29 AM	Helium valve closed
2/5/10	12:04:29 AM	H2 valve closed
2/5/10	12:04:29 AM	BCl3 valve closed
2/5/10	12:04:29 AM	PH3 valve closed
2/5/10	12:04:29 AM	SiCl4 pre valve closed
2/5/10	12:04:29 AM	SiCl4 post valve closed
2/5/10	12:04:29 AM	Main Vac valve closed
2/5/10	12:04:29 AM	Bypass valve closed
2/5/10	12:04:29 AM	Bubbler valve closed
2/5/10	12:04:29 AM	Helium MFC set to  0.000000
2/5/10	12:04:29 AM	H2 MFC set to  0.000000
2/5/10	12:04:29 AM	BCl3 MFC set to  0.000000
2/5/10	12:04:29 AM	PHl3 MFC set to  0.000000
2/5/10	12:04:29 AM	SiCl4 MFC set to  0.000000
2/5/10	12:04:29 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:04:29 AM	Tube furnace set to 0
2/5/10	12:04:29 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:05:41 AM	Program started after a nonstandard shutdown
2/5/10	12:05:50 AM	Recipe started at 12:05 AM
2/5/10	12:05:50 AM	Helium valve closed
2/5/10	12:05:50 AM	H2 valve closed
2/5/10	12:05:50 AM	BCl3 valve closed
2/5/10	12:05:50 AM	PH3 valve closed
2/5/10	12:05:50 AM	SiCl4 pre valve closed
2/5/10	12:05:50 AM	SiCl4 post valve closed
2/5/10	12:05:50 AM	Main Vac valve closed
2/5/10	12:05:50 AM	Bypass valve closed
2/5/10	12:05:50 AM	Bubbler valve closed
2/5/10	12:05:50 AM	Helium MFC set to  0.000000
2/5/10	12:05:50 AM	H2 MFC set to  0.000000
2/5/10	12:05:50 AM	BCl3 MFC set to  0.000000
2/5/10	12:05:50 AM	PHl3 MFC set to  0.000000
2/5/10	12:05:50 AM	SiCl4 MFC set to  0.000000
2/5/10	12:05:50 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:05:50 AM	Tube furnace set to 0
2/5/10	12:05:50 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:06:35 AM	Program started after a nonstandard shutdown
2/5/10	12:06:50 AM	Recipe started at 12:06 AM
2/5/10	12:06:50 AM	Helium valve closed
2/5/10	12:06:50 AM	H2 valve closed
2/5/10	12:06:50 AM	BCl3 valve closed
2/5/10	12:06:50 AM	PH3 valve closed
2/5/10	12:06:50 AM	SiCl4 pre valve closed
2/5/10	12:06:50 AM	SiCl4 post valve closed
2/5/10	12:06:50 AM	Main Vac valve closed
2/5/10	12:06:50 AM	Bypass valve closed
2/5/10	12:06:50 AM	Bubbler valve closed
2/5/10	12:06:50 AM	Helium MFC set to  0.000000
2/5/10	12:06:50 AM	H2 MFC set to  0.000000
2/5/10	12:06:50 AM	BCl3 MFC set to  0.000000
2/5/10	12:06:50 AM	PHl3 MFC set to  0.000000
2/5/10	12:06:50 AM	SiCl4 MFC set to  0.000000
2/5/10	12:06:50 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:06:50 AM	Tube furnace set to 0
2/5/10	12:06:50 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:07:00 AM	Run finished at 12:07 AM
2/5/10	12:07:15 AM	Program exited cleanly
2/5/10	12:07:47 AM	Program started normally
2/5/10	12:07:53 AM	Recipe started at 12:07 AM
2/5/10	12:07:53 AM	Helium valve closed
2/5/10	12:07:53 AM	H2 valve closed
2/5/10	12:07:53 AM	BCl3 valve closed
2/5/10	12:07:53 AM	PH3 valve closed
2/5/10	12:07:53 AM	SiCl4 pre valve closed
2/5/10	12:07:53 AM	SiCl4 post valve closed
2/5/10	12:07:53 AM	Main Vac valve closed
2/5/10	12:07:53 AM	Bypass valve closed
2/5/10	12:07:53 AM	Bubbler valve closed
2/5/10	12:07:53 AM	Helium MFC set to  0.000000
2/5/10	12:07:53 AM	H2 MFC set to  0.000000
2/5/10	12:07:53 AM	BCl3 MFC set to  0.000000
2/5/10	12:07:53 AM	PHl3 MFC set to  0.000000
2/5/10	12:07:53 AM	SiCl4 MFC set to  0.000000
2/5/10	12:07:53 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:07:53 AM	Tube furnace set to 0
2/5/10	12:07:53 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:08:04 AM	Run finished at 12:08 AM
2/5/10	12:09:15 AM	Recipe started at 12:09 AM
2/5/10	12:09:15 AM	BCl3 valve closed
2/5/10	12:09:15 AM	Main Vac valve closed
2/5/10	12:09:15 AM	Bypass valve closed
2/5/10	12:09:15 AM	Helium valve opened
2/5/10	12:09:15 AM	H2 valve opened
2/5/10	12:09:15 AM	PH3 valve opened
2/5/10	12:09:15 AM	SiCl4 pre valve opened
2/5/10	12:09:15 AM	SiCl4 post valve opened
2/5/10	12:09:15 AM	Bubbler valve opened
2/5/10	12:09:15 AM	Helium MFC set to  0.000000
2/5/10	12:09:15 AM	H2 MFC set to  0.000000
2/5/10	12:09:15 AM	BCl3 MFC set to  0.000000
2/5/10	12:09:15 AM	PHl3 MFC set to  0.000000
2/5/10	12:09:15 AM	SiCl4 MFC set to  0.000000
2/5/10	12:09:15 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:09:15 AM	Tube furnace set to 0
2/5/10	12:09:15 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:09:25 AM	Helium valve closed
2/5/10	12:09:25 AM	BCl3 valve closed
2/5/10	12:09:25 AM	PH3 valve closed
2/5/10	12:09:25 AM	SiCl4 pre valve closed
2/5/10	12:09:25 AM	SiCl4 post valve closed
2/5/10	12:09:25 AM	Main Vac valve closed
2/5/10	12:09:25 AM	Bypass valve closed
2/5/10	12:09:25 AM	H2 valve opened
2/5/10	12:09:25 AM	Bubbler valve opened
2/5/10	12:09:25 AM	Helium MFC set to  0.000000
2/5/10	12:09:25 AM	H2 MFC set to  0.000000
2/5/10	12:09:25 AM	BCl3 MFC set to  0.000000
2/5/10	12:09:25 AM	PHl3 MFC set to  0.000000
2/5/10	12:09:25 AM	SiCl4 MFC set to  0.000000
2/5/10	12:09:25 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:09:25 AM	Tube furnace set to 0
2/5/10	12:09:25 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:09:26 AM	Helium valve closed
2/5/10	12:09:26 AM	H2 valve closed
2/5/10	12:09:26 AM	BCl3 valve closed
2/5/10	12:09:26 AM	PH3 valve closed
2/5/10	12:09:26 AM	SiCl4 pre valve closed
2/5/10	12:09:26 AM	SiCl4 post valve closed
2/5/10	12:09:26 AM	Bubbler valve closed
2/5/10	12:09:26 AM	Main Vac valve opened
2/5/10	12:09:26 AM	Bypass valve opened
2/5/10	12:09:26 AM	Helium MFC set to  0.000000
2/5/10	12:09:26 AM	H2 MFC set to  0.000000
2/5/10	12:09:26 AM	BCl3 MFC set to  0.000000
2/5/10	12:09:26 AM	PHl3 MFC set to  0.000000
2/5/10	12:09:26 AM	SiCl4 MFC set to  0.000000
2/5/10	12:09:26 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:09:26 AM	Tube furnace set to 0
2/5/10	12:09:26 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:09:28 AM	Run finished at 12:09 AM
2/5/10	12:09:34 AM	Program exited cleanly
2/5/10	12:10:11 AM	Program started normally
2/5/10	12:10:25 AM	Recipe started at 12:10 AM
2/5/10	12:10:26 AM	Helium valve closed
2/5/10	12:10:26 AM	H2 valve closed
2/5/10	12:10:26 AM	BCl3 valve closed
2/5/10	12:10:26 AM	PH3 valve closed
2/5/10	12:10:26 AM	SiCl4 pre valve closed
2/5/10	12:10:26 AM	SiCl4 post valve closed
2/5/10	12:10:26 AM	Main Vac valve closed
2/5/10	12:10:26 AM	Bypass valve closed
2/5/10	12:10:26 AM	Bubbler valve closed
2/5/10	12:10:26 AM	Helium MFC set to  0.000000
2/5/10	12:10:26 AM	H2 MFC set to  0.000000
2/5/10	12:10:26 AM	BCl3 MFC set to  0.000000
2/5/10	12:10:26 AM	PHl3 MFC set to  0.000000
2/5/10	12:10:26 AM	SiCl4 MFC set to  0.000000
2/5/10	12:10:26 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:10:26 AM	Tube furnace set to 0
2/5/10	12:10:26 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:11:08 AM	Program started after a nonstandard shutdown
2/5/10	12:11:16 AM	Recipe started at 12:11 AM
2/5/10	12:11:16 AM	Helium valve closed
2/5/10	12:11:16 AM	H2 valve closed
2/5/10	12:11:16 AM	BCl3 valve closed
2/5/10	12:11:16 AM	PH3 valve closed
2/5/10	12:11:16 AM	SiCl4 pre valve closed
2/5/10	12:11:17 AM	SiCl4 post valve closed
2/5/10	12:11:17 AM	Main Vac valve closed
2/5/10	12:11:17 AM	Bypass valve closed
2/5/10	12:11:17 AM	Bubbler valve closed
2/5/10	12:11:17 AM	Helium MFC set to  0.000000
2/5/10	12:11:17 AM	H2 MFC set to  0.000000
2/5/10	12:11:17 AM	BCl3 MFC set to  0.000000
2/5/10	12:11:17 AM	PHl3 MFC set to  0.000000
2/5/10	12:11:17 AM	SiCl4 MFC set to  0.000000
2/5/10	12:11:17 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:11:17 AM	Tube furnace set to 0
2/5/10	12:11:17 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:07 AM	Program started after a nonstandard shutdown
2/5/10	12:12:13 AM	Recipe started at 12:12 AM
2/5/10	12:12:13 AM	Helium valve closed
2/5/10	12:12:13 AM	H2 valve closed
2/5/10	12:12:13 AM	BCl3 valve closed
2/5/10	12:12:13 AM	PH3 valve closed
2/5/10	12:12:13 AM	SiCl4 pre valve closed
2/5/10	12:12:13 AM	SiCl4 post valve closed
2/5/10	12:12:13 AM	Main Vac valve closed
2/5/10	12:12:13 AM	Bypass valve closed
2/5/10	12:12:13 AM	Bubbler valve closed
2/5/10	12:12:13 AM	Helium MFC set to  0.000000
2/5/10	12:12:13 AM	H2 MFC set to  0.000000
2/5/10	12:12:13 AM	BCl3 MFC set to  0.000000
2/5/10	12:12:13 AM	PHl3 MFC set to  0.000000
2/5/10	12:12:13 AM	SiCl4 MFC set to  0.000000
2/5/10	12:12:13 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:13 AM	Tube furnace set to 0
2/5/10	12:12:13 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:18 AM	Run finished at 12:12 AM
2/5/10	12:12:18 AM	Recipe started at 12:12 AM
2/5/10	12:12:18 AM	Helium valve closed
2/5/10	12:12:18 AM	H2 valve closed
2/5/10	12:12:18 AM	BCl3 valve closed
2/5/10	12:12:18 AM	PH3 valve closed
2/5/10	12:12:18 AM	SiCl4 pre valve closed
2/5/10	12:12:18 AM	SiCl4 post valve closed
2/5/10	12:12:18 AM	Main Vac valve closed
2/5/10	12:12:18 AM	Bypass valve closed
2/5/10	12:12:18 AM	Bubbler valve closed
2/5/10	12:12:18 AM	Helium MFC set to  0.000000
2/5/10	12:12:18 AM	H2 MFC set to  0.000000
2/5/10	12:12:18 AM	BCl3 MFC set to  0.000000
2/5/10	12:12:18 AM	PHl3 MFC set to  0.000000
2/5/10	12:12:18 AM	SiCl4 MFC set to  0.000000
2/5/10	12:12:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:18 AM	Tube furnace set to 0
2/5/10	12:12:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:24 AM	Run finished at 12:12 AM
2/5/10	12:12:24 AM	Recipe started at 12:12 AM
2/5/10	12:12:24 AM	Helium valve closed
2/5/10	12:12:24 AM	H2 valve closed
2/5/10	12:12:24 AM	BCl3 valve closed
2/5/10	12:12:24 AM	PH3 valve closed
2/5/10	12:12:24 AM	SiCl4 pre valve closed
2/5/10	12:12:24 AM	SiCl4 post valve closed
2/5/10	12:12:24 AM	Main Vac valve closed
2/5/10	12:12:24 AM	Bypass valve closed
2/5/10	12:12:24 AM	Bubbler valve closed
2/5/10	12:12:24 AM	Helium MFC set to  0.000000
2/5/10	12:12:24 AM	H2 MFC set to  0.000000
2/5/10	12:12:24 AM	BCl3 MFC set to  0.000000
2/5/10	12:12:24 AM	PHl3 MFC set to  0.000000
2/5/10	12:12:24 AM	SiCl4 MFC set to  0.000000
2/5/10	12:12:24 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:24 AM	Tube furnace set to 0
2/5/10	12:12:24 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:30 AM	Run finished at 12:12 AM
2/5/10	12:12:30 AM	Recipe started at 12:12 AM
2/5/10	12:12:30 AM	Helium valve closed
2/5/10	12:12:30 AM	H2 valve closed
2/5/10	12:12:30 AM	BCl3 valve closed
2/5/10	12:12:30 AM	PH3 valve closed
2/5/10	12:12:30 AM	SiCl4 pre valve closed
2/5/10	12:12:30 AM	SiCl4 post valve closed
2/5/10	12:12:30 AM	Main Vac valve closed
2/5/10	12:12:30 AM	Bypass valve closed
2/5/10	12:12:30 AM	Bubbler valve closed
2/5/10	12:12:30 AM	Helium MFC set to  0.000000
2/5/10	12:12:30 AM	H2 MFC set to  0.000000
2/5/10	12:12:30 AM	BCl3 MFC set to  0.000000
2/5/10	12:12:30 AM	PHl3 MFC set to  0.000000
2/5/10	12:12:30 AM	SiCl4 MFC set to  0.000000
2/5/10	12:12:30 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:30 AM	Tube furnace set to 0
2/5/10	12:12:30 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:35 AM	Run finished at 12:12 AM
2/5/10	12:12:35 AM	Recipe started at 12:12 AM
2/5/10	12:12:36 AM	Helium valve closed
2/5/10	12:12:36 AM	H2 valve closed
2/5/10	12:12:36 AM	BCl3 valve closed
2/5/10	12:12:36 AM	PH3 valve closed
2/5/10	12:12:36 AM	SiCl4 pre valve closed
2/5/10	12:12:36 AM	SiCl4 post valve closed
2/5/10	12:12:36 AM	Main Vac valve closed
2/5/10	12:12:36 AM	Bypass valve closed
2/5/10	12:12:36 AM	Bubbler valve closed
2/5/10	12:12:36 AM	Helium MFC set to  0.000000
2/5/10	12:12:36 AM	H2 MFC set to  0.000000
2/5/10	12:12:36 AM	BCl3 MFC set to  0.000000
2/5/10	12:12:36 AM	PHl3 MFC set to  0.000000
2/5/10	12:12:36 AM	SiCl4 MFC set to  0.000000
2/5/10	12:12:36 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:12:36 AM	Tube furnace set to 0
2/5/10	12:12:36 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:14:27 AM	Program started after a nonstandard shutdown
2/5/10	12:14:33 AM	Recipe started at 12:14 AM
2/5/10	12:14:33 AM	Helium valve closed
2/5/10	12:14:33 AM	H2 valve closed
2/5/10	12:14:33 AM	BCl3 valve closed
2/5/10	12:14:33 AM	PH3 valve closed
2/5/10	12:14:33 AM	SiCl4 pre valve closed
2/5/10	12:14:33 AM	SiCl4 post valve closed
2/5/10	12:14:33 AM	Main Vac valve closed
2/5/10	12:14:33 AM	Bypass valve closed
2/5/10	12:14:33 AM	Bubbler valve closed
2/5/10	12:14:33 AM	Helium MFC set to  0.000000
2/5/10	12:14:33 AM	H2 MFC set to  0.000000
2/5/10	12:14:33 AM	BCl3 MFC set to  0.000000
2/5/10	12:14:33 AM	PHl3 MFC set to  0.000000
2/5/10	12:14:33 AM	SiCl4 MFC set to  0.000000
2/5/10	12:14:33 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:14:33 AM	Tube furnace set to 0
2/5/10	12:14:33 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:14:39 AM	Run finished at 12:14 AM
2/5/10	12:14:40 AM	Recipe started at 12:14 AM
2/5/10	12:14:40 AM	Helium valve closed
2/5/10	12:14:40 AM	H2 valve closed
2/5/10	12:14:40 AM	BCl3 valve closed
2/5/10	12:14:40 AM	PH3 valve closed
2/5/10	12:14:40 AM	SiCl4 pre valve closed
2/5/10	12:14:40 AM	SiCl4 post valve closed
2/5/10	12:14:40 AM	Main Vac valve closed
2/5/10	12:14:40 AM	Bypass valve closed
2/5/10	12:14:40 AM	Bubbler valve closed
2/5/10	12:14:40 AM	Helium MFC set to  0.000000
2/5/10	12:14:40 AM	H2 MFC set to  0.000000
2/5/10	12:14:40 AM	BCl3 MFC set to  0.000000
2/5/10	12:14:40 AM	PHl3 MFC set to  0.000000
2/5/10	12:14:40 AM	SiCl4 MFC set to  0.000000
2/5/10	12:14:40 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:14:40 AM	Tube furnace set to 0
2/5/10	12:14:40 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:06 AM	Program started after a nonstandard shutdown
2/5/10	12:15:10 AM	Recipe started at 12:15 AM
2/5/10	12:15:10 AM	Helium valve closed
2/5/10	12:15:10 AM	H2 valve closed
2/5/10	12:15:10 AM	BCl3 valve closed
2/5/10	12:15:10 AM	PH3 valve closed
2/5/10	12:15:10 AM	SiCl4 pre valve closed
2/5/10	12:15:10 AM	SiCl4 post valve closed
2/5/10	12:15:10 AM	Main Vac valve closed
2/5/10	12:15:10 AM	Bypass valve closed
2/5/10	12:15:10 AM	Bubbler valve closed
2/5/10	12:15:10 AM	Helium MFC set to  0.000000
2/5/10	12:15:10 AM	H2 MFC set to  0.000000
2/5/10	12:15:10 AM	BCl3 MFC set to  0.000000
2/5/10	12:15:10 AM	PHl3 MFC set to  0.000000
2/5/10	12:15:10 AM	SiCl4 MFC set to  0.000000
2/5/10	12:15:10 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:10 AM	Tube furnace set to 0
2/5/10	12:15:10 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:15 AM	Run finished at 12:15 AM
2/5/10	12:15:15 AM	Recipe started at 12:15 AM
2/5/10	12:15:15 AM	Helium valve closed
2/5/10	12:15:15 AM	H2 valve closed
2/5/10	12:15:15 AM	BCl3 valve closed
2/5/10	12:15:15 AM	PH3 valve closed
2/5/10	12:15:15 AM	SiCl4 pre valve closed
2/5/10	12:15:15 AM	SiCl4 post valve closed
2/5/10	12:15:15 AM	Main Vac valve closed
2/5/10	12:15:15 AM	Bypass valve closed
2/5/10	12:15:15 AM	Bubbler valve closed
2/5/10	12:15:15 AM	Helium MFC set to  0.000000
2/5/10	12:15:15 AM	H2 MFC set to  0.000000
2/5/10	12:15:16 AM	BCl3 MFC set to  0.000000
2/5/10	12:15:16 AM	PHl3 MFC set to  0.000000
2/5/10	12:15:16 AM	SiCl4 MFC set to  0.000000
2/5/10	12:15:16 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:16 AM	Tube furnace set to 0
2/5/10	12:15:16 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:21 AM	Run finished at 12:15 AM
2/5/10	12:15:25 AM	Recipe started at 12:15 AM
2/5/10	12:15:25 AM	Helium valve closed
2/5/10	12:15:25 AM	H2 valve closed
2/5/10	12:15:25 AM	BCl3 valve closed
2/5/10	12:15:26 AM	PH3 valve closed
2/5/10	12:15:26 AM	SiCl4 pre valve closed
2/5/10	12:15:26 AM	SiCl4 post valve closed
2/5/10	12:15:26 AM	Main Vac valve closed
2/5/10	12:15:26 AM	Bypass valve closed
2/5/10	12:15:26 AM	Bubbler valve closed
2/5/10	12:15:26 AM	Helium MFC set to  0.000000
2/5/10	12:15:26 AM	H2 MFC set to  0.000000
2/5/10	12:15:26 AM	BCl3 MFC set to  0.000000
2/5/10	12:15:26 AM	PHl3 MFC set to  0.000000
2/5/10	12:15:26 AM	SiCl4 MFC set to  0.000000
2/5/10	12:15:26 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:26 AM	Tube furnace set to 0
2/5/10	12:15:26 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:31 AM	Run finished at 12:15 AM
2/5/10	12:15:47 AM	Recipe started at 12:15 AM
2/5/10	12:15:47 AM	Helium valve closed
2/5/10	12:15:47 AM	H2 valve closed
2/5/10	12:15:47 AM	BCl3 valve closed
2/5/10	12:15:47 AM	PH3 valve closed
2/5/10	12:15:47 AM	SiCl4 pre valve closed
2/5/10	12:15:47 AM	SiCl4 post valve closed
2/5/10	12:15:47 AM	Main Vac valve closed
2/5/10	12:15:47 AM	Bypass valve closed
2/5/10	12:15:47 AM	Bubbler valve closed
2/5/10	12:15:47 AM	Helium MFC set to  0.000000
2/5/10	12:15:47 AM	H2 MFC set to  0.000000
2/5/10	12:15:47 AM	BCl3 MFC set to  0.000000
2/5/10	12:15:47 AM	PHl3 MFC set to  0.000000
2/5/10	12:15:47 AM	SiCl4 MFC set to  0.000000
2/5/10	12:15:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:47 AM	Tube furnace set to 0
2/5/10	12:15:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:50 AM	Helium valve closed
2/5/10	12:15:50 AM	H2 valve closed
2/5/10	12:15:50 AM	BCl3 valve closed
2/5/10	12:15:50 AM	PH3 valve closed
2/5/10	12:15:50 AM	SiCl4 pre valve closed
2/5/10	12:15:50 AM	SiCl4 post valve closed
2/5/10	12:15:50 AM	Main Vac valve closed
2/5/10	12:15:50 AM	Bypass valve closed
2/5/10	12:15:50 AM	Bubbler valve closed
2/5/10	12:15:50 AM	Helium MFC set to  0.000000
2/5/10	12:15:50 AM	H2 MFC set to  0.000000
2/5/10	12:15:50 AM	BCl3 MFC set to  0.000000
2/5/10	12:15:50 AM	PHl3 MFC set to  0.000000
2/5/10	12:15:50 AM	SiCl4 MFC set to  0.000000
2/5/10	12:15:50 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:50 AM	Tube furnace set to 0
2/5/10	12:15:50 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:15:52 AM	Run finished at 12:15 AM
2/5/10	12:16:20 AM	Program exited cleanly
2/5/10	12:17:13 AM	Program started normally
2/5/10	12:17:20 AM	Recipe started at 12:17 AM
2/5/10	12:17:21 AM	Helium valve closed
2/5/10	12:17:21 AM	H2 valve closed
2/5/10	12:17:21 AM	BCl3 valve closed
2/5/10	12:17:21 AM	PH3 valve closed
2/5/10	12:17:21 AM	SiCl4 pre valve closed
2/5/10	12:17:21 AM	SiCl4 post valve closed
2/5/10	12:17:21 AM	Main Vac valve closed
2/5/10	12:17:21 AM	Bypass valve closed
2/5/10	12:17:21 AM	Bubbler valve closed
2/5/10	12:17:21 AM	Helium MFC set to  0.000000
2/5/10	12:17:21 AM	H2 MFC set to  0.000000
2/5/10	12:17:21 AM	BCl3 MFC set to  0.000000
2/5/10	12:17:21 AM	PHl3 MFC set to  0.000000
2/5/10	12:17:21 AM	SiCl4 MFC set to  0.000000
2/5/10	12:17:21 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:17:21 AM	Tube furnace set to 0
2/5/10	12:17:21 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:17:24 AM	Helium valve closed
2/5/10	12:17:24 AM	H2 valve closed
2/5/10	12:17:24 AM	BCl3 valve closed
2/5/10	12:17:24 AM	PH3 valve closed
2/5/10	12:17:24 AM	SiCl4 pre valve closed
2/5/10	12:17:24 AM	SiCl4 post valve closed
2/5/10	12:17:24 AM	Main Vac valve closed
2/5/10	12:17:24 AM	Bypass valve closed
2/5/10	12:17:24 AM	Bubbler valve closed
2/5/10	12:17:24 AM	Helium MFC set to  0.000000
2/5/10	12:17:24 AM	H2 MFC set to  0.000000
2/5/10	12:17:24 AM	BCl3 MFC set to  0.000000
2/5/10	12:17:24 AM	PHl3 MFC set to  0.000000
2/5/10	12:17:24 AM	SiCl4 MFC set to  0.000000
2/5/10	12:17:24 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:17:24 AM	Tube furnace set to 0
2/5/10	12:17:24 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:17:28 AM	Run finished at 12:17 AM
2/5/10	12:51:50 AM	Program started after a nonstandard shutdown
2/5/10	12:52:06 AM	Recipe started at 12:52 AM
2/5/10	12:52:06 AM	Helium valve closed
2/5/10	12:52:06 AM	H2 valve closed
2/5/10	12:52:06 AM	BCl3 valve closed
2/5/10	12:52:06 AM	PH3 valve closed
2/5/10	12:52:06 AM	SiCl4 pre valve closed
2/5/10	12:52:06 AM	SiCl4 post valve closed
2/5/10	12:52:06 AM	Main Vac valve closed
2/5/10	12:52:06 AM	Bypass valve closed
2/5/10	12:52:06 AM	Bubbler valve closed
2/5/10	12:52:06 AM	Helium MFC set to  0.000000
2/5/10	12:52:06 AM	H2 MFC set to  0.000000
2/5/10	12:52:06 AM	BCl3 MFC set to  0.000000
2/5/10	12:52:06 AM	PHl3 MFC set to  0.000000
2/5/10	12:52:06 AM	SiCl4 MFC set to  0.000000
2/5/10	12:52:06 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:52:06 AM	Tube furnace set to 0
2/5/10	12:52:06 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:52:08 AM	Run aborted at 12:52 AM
2/5/10	12:52:12 AM	Recipe started at 12:52 AM
2/5/10	12:52:12 AM	Helium valve closed
2/5/10	12:52:12 AM	H2 valve closed
2/5/10	12:52:12 AM	BCl3 valve closed
2/5/10	12:52:12 AM	PH3 valve closed
2/5/10	12:52:12 AM	SiCl4 pre valve closed
2/5/10	12:52:12 AM	SiCl4 post valve closed
2/5/10	12:52:12 AM	Main Vac valve closed
2/5/10	12:52:12 AM	Bypass valve closed
2/5/10	12:52:12 AM	Bubbler valve closed
2/5/10	12:52:12 AM	Helium MFC set to  0.000000
2/5/10	12:52:12 AM	H2 MFC set to  0.000000
2/5/10	12:52:12 AM	BCl3 MFC set to  0.000000
2/5/10	12:52:12 AM	PHl3 MFC set to  0.000000
2/5/10	12:52:12 AM	SiCl4 MFC set to  0.000000
2/5/10	12:52:12 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:52:12 AM	Tube furnace set to 0
2/5/10	12:52:12 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:52:13 AM	Run aborted at 12:52 AM
2/5/10	12:52:17 AM	Program exited cleanly
2/5/10	12:53:22 AM	Program started normally
2/5/10	12:53:39 AM	Recipe started at 12:53 AM
2/5/10	12:53:39 AM	Helium valve closed
2/5/10	12:53:39 AM	H2 valve closed
2/5/10	12:53:39 AM	BCl3 valve closed
2/5/10	12:53:39 AM	PH3 valve closed
2/5/10	12:53:39 AM	SiCl4 pre valve closed
2/5/10	12:53:39 AM	SiCl4 post valve closed
2/5/10	12:53:39 AM	Main Vac valve closed
2/5/10	12:53:39 AM	Bypass valve closed
2/5/10	12:53:39 AM	Bubbler valve closed
2/5/10	12:53:39 AM	Helium MFC set to  0.000000
2/5/10	12:53:39 AM	H2 MFC set to  0.000000
2/5/10	12:53:39 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:39 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:39 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:39 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:39 AM	Tube furnace set to 0
2/5/10	12:53:39 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:39 AM	Run aborted at 12:53 AM
2/5/10	12:53:42 AM	Recipe started at 12:53 AM
2/5/10	12:53:42 AM	Helium valve closed
2/5/10	12:53:42 AM	H2 valve closed
2/5/10	12:53:42 AM	BCl3 valve closed
2/5/10	12:53:42 AM	PH3 valve closed
2/5/10	12:53:42 AM	SiCl4 pre valve closed
2/5/10	12:53:42 AM	SiCl4 post valve closed
2/5/10	12:53:42 AM	Main Vac valve closed
2/5/10	12:53:42 AM	Bypass valve closed
2/5/10	12:53:42 AM	Bubbler valve closed
2/5/10	12:53:42 AM	Helium MFC set to  0.000000
2/5/10	12:53:42 AM	H2 MFC set to  0.000000
2/5/10	12:53:42 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:42 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:42 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:42 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:42 AM	Tube furnace set to 0
2/5/10	12:53:42 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:43 AM	Run aborted at 12:53 AM
2/5/10	12:53:46 AM	Recipe started at 12:53 AM
2/5/10	12:53:46 AM	Helium valve closed
2/5/10	12:53:46 AM	H2 valve closed
2/5/10	12:53:46 AM	BCl3 valve closed
2/5/10	12:53:46 AM	PH3 valve closed
2/5/10	12:53:46 AM	SiCl4 pre valve closed
2/5/10	12:53:46 AM	SiCl4 post valve closed
2/5/10	12:53:46 AM	Main Vac valve closed
2/5/10	12:53:46 AM	Bypass valve closed
2/5/10	12:53:46 AM	Bubbler valve closed
2/5/10	12:53:46 AM	Helium MFC set to  0.000000
2/5/10	12:53:46 AM	H2 MFC set to  0.000000
2/5/10	12:53:46 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:46 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:46 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:46 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:46 AM	Tube furnace set to 0
2/5/10	12:53:46 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:49 AM	Helium valve closed
2/5/10	12:53:49 AM	H2 valve closed
2/5/10	12:53:49 AM	BCl3 valve closed
2/5/10	12:53:49 AM	PH3 valve closed
2/5/10	12:53:49 AM	SiCl4 pre valve closed
2/5/10	12:53:49 AM	SiCl4 post valve closed
2/5/10	12:53:49 AM	Main Vac valve closed
2/5/10	12:53:49 AM	Bypass valve closed
2/5/10	12:53:49 AM	Bubbler valve closed
2/5/10	12:53:49 AM	Helium MFC set to  0.000000
2/5/10	12:53:49 AM	H2 MFC set to  0.000000
2/5/10	12:53:49 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:49 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:49 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:49 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:49 AM	Tube furnace set to 0
2/5/10	12:53:49 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:51 AM	Helium valve closed
2/5/10	12:53:51 AM	H2 valve closed
2/5/10	12:53:51 AM	BCl3 valve closed
2/5/10	12:53:51 AM	PH3 valve closed
2/5/10	12:53:51 AM	SiCl4 pre valve closed
2/5/10	12:53:51 AM	SiCl4 post valve closed
2/5/10	12:53:51 AM	Main Vac valve closed
2/5/10	12:53:51 AM	Bypass valve closed
2/5/10	12:53:51 AM	Bubbler valve closed
2/5/10	12:53:51 AM	Helium MFC set to  0.000000
2/5/10	12:53:51 AM	H2 MFC set to  0.000000
2/5/10	12:53:51 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:51 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:51 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:51 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:51 AM	Tube furnace set to 0
2/5/10	12:53:51 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:54 AM	Helium valve closed
2/5/10	12:53:54 AM	H2 valve closed
2/5/10	12:53:54 AM	BCl3 valve closed
2/5/10	12:53:54 AM	PH3 valve closed
2/5/10	12:53:54 AM	SiCl4 pre valve closed
2/5/10	12:53:54 AM	SiCl4 post valve closed
2/5/10	12:53:54 AM	Main Vac valve closed
2/5/10	12:53:54 AM	Bypass valve closed
2/5/10	12:53:54 AM	Bubbler valve closed
2/5/10	12:53:54 AM	Helium MFC set to  0.000000
2/5/10	12:53:54 AM	H2 MFC set to  0.000000
2/5/10	12:53:54 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:54 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:54 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:54 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:54 AM	Tube furnace set to 0
2/5/10	12:53:54 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:56 AM	Run finished at 12:53 AM
2/5/10	12:53:58 AM	Recipe started at 12:53 AM
2/5/10	12:53:58 AM	Helium valve closed
2/5/10	12:53:58 AM	H2 valve closed
2/5/10	12:53:58 AM	BCl3 valve closed
2/5/10	12:53:58 AM	PH3 valve closed
2/5/10	12:53:58 AM	SiCl4 pre valve closed
2/5/10	12:53:58 AM	SiCl4 post valve closed
2/5/10	12:53:58 AM	Main Vac valve closed
2/5/10	12:53:58 AM	Bypass valve closed
2/5/10	12:53:58 AM	Bubbler valve closed
2/5/10	12:53:58 AM	Helium MFC set to  0.000000
2/5/10	12:53:58 AM	H2 MFC set to  0.000000
2/5/10	12:53:58 AM	BCl3 MFC set to  0.000000
2/5/10	12:53:58 AM	PHl3 MFC set to  0.000000
2/5/10	12:53:58 AM	SiCl4 MFC set to  0.000000
2/5/10	12:53:58 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:53:58 AM	Tube furnace set to 0
2/5/10	12:53:58 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:01 AM	Helium valve closed
2/5/10	12:54:01 AM	H2 valve closed
2/5/10	12:54:01 AM	BCl3 valve closed
2/5/10	12:54:01 AM	PH3 valve closed
2/5/10	12:54:01 AM	SiCl4 pre valve closed
2/5/10	12:54:01 AM	SiCl4 post valve closed
2/5/10	12:54:01 AM	Main Vac valve closed
2/5/10	12:54:01 AM	Bypass valve closed
2/5/10	12:54:01 AM	Bubbler valve closed
2/5/10	12:54:01 AM	Helium MFC set to  0.000000
2/5/10	12:54:01 AM	H2 MFC set to  0.000000
2/5/10	12:54:01 AM	BCl3 MFC set to  0.000000
2/5/10	12:54:01 AM	PHl3 MFC set to  0.000000
2/5/10	12:54:01 AM	SiCl4 MFC set to  0.000000
2/5/10	12:54:01 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:01 AM	Tube furnace set to 0
2/5/10	12:54:01 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:03 AM	Run aborted at 12:54 AM
2/5/10	12:54:14 AM	Recipe started at 12:54 AM
2/5/10	12:54:14 AM	Helium valve closed
2/5/10	12:54:14 AM	H2 valve closed
2/5/10	12:54:14 AM	BCl3 valve closed
2/5/10	12:54:14 AM	PH3 valve closed
2/5/10	12:54:14 AM	SiCl4 pre valve closed
2/5/10	12:54:14 AM	SiCl4 post valve closed
2/5/10	12:54:14 AM	Main Vac valve closed
2/5/10	12:54:14 AM	Bypass valve closed
2/5/10	12:54:14 AM	Bubbler valve closed
2/5/10	12:54:14 AM	Helium MFC set to  0.000000
2/5/10	12:54:14 AM	H2 MFC set to  0.000000
2/5/10	12:54:14 AM	BCl3 MFC set to  0.000000
2/5/10	12:54:14 AM	PHl3 MFC set to  0.000000
2/5/10	12:54:14 AM	SiCl4 MFC set to  0.000000
2/5/10	12:54:14 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:14 AM	Tube furnace set to 0
2/5/10	12:54:14 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:14 AM	Run aborted at 12:54 AM
2/5/10	12:54:18 AM	Recipe started at 12:54 AM
2/5/10	12:54:18 AM	Helium valve closed
2/5/10	12:54:18 AM	H2 valve closed
2/5/10	12:54:18 AM	BCl3 valve closed
2/5/10	12:54:18 AM	PH3 valve closed
2/5/10	12:54:18 AM	SiCl4 pre valve closed
2/5/10	12:54:18 AM	SiCl4 post valve closed
2/5/10	12:54:18 AM	Main Vac valve closed
2/5/10	12:54:18 AM	Bypass valve closed
2/5/10	12:54:18 AM	Bubbler valve closed
2/5/10	12:54:18 AM	Helium MFC set to  0.000000
2/5/10	12:54:18 AM	H2 MFC set to  0.000000
2/5/10	12:54:18 AM	BCl3 MFC set to  0.000000
2/5/10	12:54:18 AM	PHl3 MFC set to  0.000000
2/5/10	12:54:18 AM	SiCl4 MFC set to  0.000000
2/5/10	12:54:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:18 AM	Tube furnace set to 0
2/5/10	12:54:18 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:54:19 AM	Run aborted at 12:54 AM
2/5/10	12:55:08 AM	Program started after a nonstandard shutdown
2/5/10	12:55:20 AM	Recipe started at 12:55 AM
2/5/10	12:55:20 AM	Helium valve closed
2/5/10	12:55:20 AM	H2 valve closed
2/5/10	12:55:20 AM	BCl3 valve closed
2/5/10	12:55:20 AM	PH3 valve closed
2/5/10	12:55:20 AM	SiCl4 pre valve closed
2/5/10	12:55:20 AM	SiCl4 post valve closed
2/5/10	12:55:20 AM	Main Vac valve closed
2/5/10	12:55:20 AM	Bypass valve closed
2/5/10	12:55:20 AM	Bubbler valve closed
2/5/10	12:55:20 AM	Helium MFC set to  0.000000
2/5/10	12:55:20 AM	H2 MFC set to  0.000000
2/5/10	12:55:20 AM	BCl3 MFC set to  0.000000
2/5/10	12:55:20 AM	PHl3 MFC set to  0.000000
2/5/10	12:55:20 AM	SiCl4 MFC set to  0.000000
2/5/10	12:55:20 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:20 AM	Tube furnace set to 0
2/5/10	12:55:20 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:22 AM	Helium valve closed
2/5/10	12:55:22 AM	H2 valve closed
2/5/10	12:55:22 AM	BCl3 valve closed
2/5/10	12:55:22 AM	PH3 valve closed
2/5/10	12:55:22 AM	SiCl4 pre valve closed
2/5/10	12:55:22 AM	SiCl4 post valve closed
2/5/10	12:55:22 AM	Main Vac valve closed
2/5/10	12:55:22 AM	Bypass valve closed
2/5/10	12:55:22 AM	Bubbler valve closed
2/5/10	12:55:22 AM	Helium MFC set to  0.000000
2/5/10	12:55:22 AM	H2 MFC set to  0.000000
2/5/10	12:55:22 AM	BCl3 MFC set to  0.000000
2/5/10	12:55:22 AM	PHl3 MFC set to  0.000000
2/5/10	12:55:22 AM	SiCl4 MFC set to  0.000000
2/5/10	12:55:22 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:22 AM	Tube furnace set to 0
2/5/10	12:55:22 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:23 AM	Run aborted at 12:55 AM
2/5/10	12:55:27 AM	Recipe started at 12:55 AM
2/5/10	12:55:27 AM	Helium valve closed
2/5/10	12:55:27 AM	H2 valve closed
2/5/10	12:55:27 AM	BCl3 valve closed
2/5/10	12:55:27 AM	PH3 valve closed
2/5/10	12:55:27 AM	SiCl4 pre valve closed
2/5/10	12:55:27 AM	SiCl4 post valve closed
2/5/10	12:55:27 AM	Main Vac valve closed
2/5/10	12:55:27 AM	Bypass valve closed
2/5/10	12:55:27 AM	Bubbler valve closed
2/5/10	12:55:27 AM	Helium MFC set to  0.000000
2/5/10	12:55:27 AM	H2 MFC set to  0.000000
2/5/10	12:55:27 AM	BCl3 MFC set to  0.000000
2/5/10	12:55:27 AM	PHl3 MFC set to  0.000000
2/5/10	12:55:27 AM	SiCl4 MFC set to  0.000000
2/5/10	12:55:27 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:27 AM	Tube furnace set to 0
2/5/10	12:55:27 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:29 AM	Helium valve closed
2/5/10	12:55:29 AM	H2 valve closed
2/5/10	12:55:29 AM	BCl3 valve closed
2/5/10	12:55:29 AM	PH3 valve closed
2/5/10	12:55:29 AM	SiCl4 pre valve closed
2/5/10	12:55:29 AM	SiCl4 post valve closed
2/5/10	12:55:29 AM	Main Vac valve closed
2/5/10	12:55:29 AM	Bypass valve closed
2/5/10	12:55:29 AM	Bubbler valve closed
2/5/10	12:55:29 AM	Helium MFC set to  0.000000
2/5/10	12:55:29 AM	H2 MFC set to  0.000000
2/5/10	12:55:29 AM	BCl3 MFC set to  0.000000
2/5/10	12:55:29 AM	PHl3 MFC set to  0.000000
2/5/10	12:55:29 AM	SiCl4 MFC set to  0.000000
2/5/10	12:55:29 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:29 AM	Tube furnace set to 0
2/5/10	12:55:29 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:31 AM	Helium valve closed
2/5/10	12:55:31 AM	H2 valve closed
2/5/10	12:55:31 AM	BCl3 valve closed
2/5/10	12:55:31 AM	PH3 valve closed
2/5/10	12:55:31 AM	SiCl4 pre valve closed
2/5/10	12:55:31 AM	SiCl4 post valve closed
2/5/10	12:55:31 AM	Main Vac valve closed
2/5/10	12:55:31 AM	Bypass valve closed
2/5/10	12:55:31 AM	Bubbler valve closed
2/5/10	12:55:31 AM	Helium MFC set to  0.000000
2/5/10	12:55:31 AM	H2 MFC set to  0.000000
2/5/10	12:55:31 AM	BCl3 MFC set to  0.000000
2/5/10	12:55:31 AM	PHl3 MFC set to  0.000000
2/5/10	12:55:31 AM	SiCl4 MFC set to  0.000000
2/5/10	12:55:31 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:31 AM	Tube furnace set to 0
2/5/10	12:55:31 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:33 AM	Helium valve closed
2/5/10	12:55:33 AM	H2 valve closed
2/5/10	12:55:33 AM	BCl3 valve closed
2/5/10	12:55:33 AM	PH3 valve closed
2/5/10	12:55:33 AM	SiCl4 pre valve closed
2/5/10	12:55:33 AM	SiCl4 post valve closed
2/5/10	12:55:33 AM	Main Vac valve closed
2/5/10	12:55:33 AM	Bypass valve closed
2/5/10	12:55:33 AM	Bubbler valve closed
2/5/10	12:55:33 AM	Helium MFC set to  0.000000
2/5/10	12:55:33 AM	H2 MFC set to  0.000000
2/5/10	12:55:33 AM	BCl3 MFC set to  0.000000
2/5/10	12:55:33 AM	PHl3 MFC set to  0.000000
2/5/10	12:55:33 AM	SiCl4 MFC set to  0.000000
2/5/10	12:55:33 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:33 AM	Tube furnace set to 0
2/5/10	12:55:33 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:55:34 AM	Run aborted at 12:55 AM
2/5/10	12:56:34 AM	Recipe started at 12:56 AM
2/5/10	12:56:34 AM	Helium valve closed
2/5/10	12:56:34 AM	H2 valve closed
2/5/10	12:56:34 AM	BCl3 valve closed
2/5/10	12:56:34 AM	PH3 valve closed
2/5/10	12:56:34 AM	SiCl4 pre valve closed
2/5/10	12:56:34 AM	SiCl4 post valve closed
2/5/10	12:56:34 AM	Main Vac valve closed
2/5/10	12:56:34 AM	Bypass valve closed
2/5/10	12:56:34 AM	Bubbler valve closed
2/5/10	12:56:34 AM	Helium MFC set to  0.000000
2/5/10	12:56:34 AM	H2 MFC set to  0.000000
2/5/10	12:56:34 AM	BCl3 MFC set to  0.000000
2/5/10	12:56:34 AM	PHl3 MFC set to  0.000000
2/5/10	12:56:34 AM	SiCl4 MFC set to  0.000000
2/5/10	12:56:34 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:56:34 AM	Tube furnace set to 0
2/5/10	12:56:34 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:56:36 AM	H2 valve closed
2/5/10	12:56:36 AM	BCl3 valve closed
2/5/10	12:56:36 AM	SiCl4 post valve closed
2/5/10	12:56:36 AM	Main Vac valve closed
2/5/10	12:56:36 AM	Bubbler valve closed
2/5/10	12:56:36 AM	Helium valve opened
2/5/10	12:56:36 AM	PH3 valve opened
2/5/10	12:56:36 AM	SiCl4 pre valve opened
2/5/10	12:56:36 AM	Bypass valve opened
2/5/10	12:56:36 AM	Helium MFC set to  0.000000
2/5/10	12:56:36 AM	H2 MFC set to  0.000000
2/5/10	12:56:36 AM	BCl3 MFC set to  0.000000
2/5/10	12:56:36 AM	PHl3 MFC set to  0.000000
2/5/10	12:56:36 AM	SiCl4 MFC set to  0.000000
2/5/10	12:56:36 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:56:36 AM	Tube furnace set to 0
2/5/10	12:56:36 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:56:38 AM	Run finished at 12:56 AM
2/5/10	12:57:03 AM	Program exited cleanly
2/5/10	12:57:46 AM	Program started normally
2/5/10	12:57:50 AM	Recipe started at 12:57 AM
2/5/10	12:57:50 AM	Helium valve closed
2/5/10	12:57:50 AM	H2 valve closed
2/5/10	12:57:50 AM	BCl3 valve closed
2/5/10	12:57:50 AM	PH3 valve closed
2/5/10	12:57:50 AM	SiCl4 pre valve closed
2/5/10	12:57:50 AM	SiCl4 post valve closed
2/5/10	12:57:50 AM	Main Vac valve closed
2/5/10	12:57:51 AM	Bypass valve closed
2/5/10	12:57:51 AM	Bubbler valve closed
2/5/10	12:57:51 AM	Helium MFC set to  0.000000
2/5/10	12:57:51 AM	H2 MFC set to  0.000000
2/5/10	12:57:51 AM	BCl3 MFC set to  0.000000
2/5/10	12:57:51 AM	PHl3 MFC set to  0.000000
2/5/10	12:57:51 AM	SiCl4 MFC set to  0.000000
2/5/10	12:57:51 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:57:51 AM	Tube furnace set to 0
2/5/10	12:57:51 AM	Bypass solenoid MFC set to  0.000000
2/5/10	12:57:51 AM	Run finished at 12:57 AM
2/5/10	12:58:01 AM	Program exited cleanly
2/5/10	1:01:26 AM	Program started normally
2/5/10	1:01:30 AM	Program exited cleanly
2/5/10	1:02:31 AM	Program started normally
2/5/10	1:03:29 AM	Program exited cleanly
2/5/10	1:04:42 AM	Program started normally
2/5/10	1:06:11 AM	Program exited cleanly
2/5/10	1:06:13 AM	Program started normally
2/5/10	1:07:21 AM	Program exited cleanly
2/5/10	1:07:22 AM	Program started normally
2/5/10	1:08:47 AM	Recipe started at 1:08 AM
2/5/10	1:08:47 AM	Helium valve closed
2/5/10	1:08:47 AM	H2 valve closed
2/5/10	1:08:47 AM	BCl3 valve closed
2/5/10	1:08:47 AM	SiCl4 pre valve closed
2/5/10	1:08:47 AM	SiCl4 post valve closed
2/5/10	1:08:47 AM	Main Vac valve closed
2/5/10	1:08:47 AM	Bypass valve closed
2/5/10	1:08:47 AM	Bubbler valve closed
2/5/10	1:08:47 AM	PH3 valve opened
2/5/10	1:08:47 AM	Helium MFC set to  0.000000
2/5/10	1:08:47 AM	H2 MFC set to  0.000000
2/5/10	1:08:47 AM	BCl3 MFC set to  0.000000
2/5/10	1:08:47 AM	PHl3 MFC set to  0.000000
2/5/10	1:08:47 AM	SiCl4 MFC set to  0.000000
2/5/10	1:08:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:08:47 AM	Tube furnace set to 0
2/5/10	1:08:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:08:48 AM	Helium valve closed
2/5/10	1:08:48 AM	H2 valve closed
2/5/10	1:08:48 AM	PH3 valve closed
2/5/10	1:08:48 AM	SiCl4 pre valve closed
2/5/10	1:08:48 AM	SiCl4 post valve closed
2/5/10	1:08:48 AM	Main Vac valve closed
2/5/10	1:08:48 AM	Bypass valve closed
2/5/10	1:08:48 AM	Bubbler valve closed
2/5/10	1:08:48 AM	BCl3 valve opened
2/5/10	1:08:48 AM	Helium MFC set to  0.000000
2/5/10	1:08:48 AM	H2 MFC set to  0.000000
2/5/10	1:08:48 AM	BCl3 MFC set to  0.000000
2/5/10	1:08:48 AM	PHl3 MFC set to  0.000000
2/5/10	1:08:48 AM	SiCl4 MFC set to  0.000000
2/5/10	1:08:48 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:08:48 AM	Tube furnace set to 0
2/5/10	1:08:48 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:08:56 AM	Run aborted at 1:08 AM
2/5/10	1:09:15 AM	Program exited cleanly
2/5/10	1:10:26 AM	Program started normally
2/5/10	1:10:29 AM	Program exited cleanly
2/5/10	1:10:32 AM	Program started normally
2/5/10	1:15:56 AM	Program exited cleanly
2/5/10	1:35:29 AM	Program started normally
2/5/10	1:35:44 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-04:tasks:vent.xml
2/5/10	1:35:47 AM	H2 valve closed
2/5/10	1:35:47 AM	BCl3 valve closed
2/5/10	1:35:47 AM	PH3 valve closed
2/5/10	1:35:47 AM	SiCl4 pre valve closed
2/5/10	1:35:47 AM	SiCl4 post valve closed
2/5/10	1:35:47 AM	Main Vac valve closed
2/5/10	1:35:47 AM	Bypass valve closed
2/5/10	1:35:47 AM	Bubbler valve closed
2/5/10	1:35:47 AM	Helium valve opened
2/5/10	1:35:47 AM	Helium MFC set to  0.000000
2/5/10	1:35:47 AM	H2 MFC set to  0.000000
2/5/10	1:35:47 AM	BCl3 MFC set to  0.000000
2/5/10	1:35:47 AM	PHl3 MFC set to  0.000000
2/5/10	1:35:47 AM	SiCl4 MFC set to  0.000000
2/5/10	1:35:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:35:47 AM	Tube furnace set to 0
2/5/10	1:35:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:35:48 AM	Helium valve closed
2/5/10	1:35:48 AM	H2 valve closed
2/5/10	1:35:48 AM	BCl3 valve closed
2/5/10	1:35:48 AM	PH3 valve closed
2/5/10	1:35:48 AM	SiCl4 pre valve closed
2/5/10	1:35:48 AM	SiCl4 post valve closed
2/5/10	1:35:48 AM	Main Vac valve closed
2/5/10	1:35:48 AM	Bypass valve closed
2/5/10	1:35:48 AM	Bubbler valve closed
2/5/10	1:35:48 AM	Helium MFC set to  0.000000
2/5/10	1:35:48 AM	H2 MFC set to  0.000000
2/5/10	1:35:48 AM	BCl3 MFC set to  0.000000
2/5/10	1:35:48 AM	PHl3 MFC set to  0.000000
2/5/10	1:35:48 AM	SiCl4 MFC set to  0.000000
2/5/10	1:35:48 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:35:48 AM	Tube furnace set to 0
2/5/10	1:35:48 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:35:48 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-04:tasks:vent.xml
2/5/10	1:36:13 AM	Program exited cleanly
2/5/10	1:39:02 AM	Program started normally
2/5/10	1:39:06 AM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-04:tasks:vent.xml
2/5/10	1:39:10 AM	H2 valve closed
2/5/10	1:39:10 AM	BCl3 valve closed
2/5/10	1:39:10 AM	PH3 valve closed
2/5/10	1:39:10 AM	SiCl4 pre valve closed
2/5/10	1:39:10 AM	SiCl4 post valve closed
2/5/10	1:39:10 AM	Main Vac valve closed
2/5/10	1:39:10 AM	Bypass valve closed
2/5/10	1:39:10 AM	Bubbler valve closed
2/5/10	1:39:10 AM	Helium valve opened
2/5/10	1:39:10 AM	Helium MFC set to  0.000000
2/5/10	1:39:10 AM	H2 MFC set to  0.000000
2/5/10	1:39:10 AM	BCl3 MFC set to  0.000000
2/5/10	1:39:10 AM	PHl3 MFC set to  0.000000
2/5/10	1:39:10 AM	SiCl4 MFC set to  0.000000
2/5/10	1:39:10 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:39:10 AM	Tube furnace set to 0
2/5/10	1:39:10 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:39:11 AM	Helium valve closed
2/5/10	1:39:11 AM	H2 valve closed
2/5/10	1:39:11 AM	BCl3 valve closed
2/5/10	1:39:11 AM	PH3 valve closed
2/5/10	1:39:11 AM	SiCl4 pre valve closed
2/5/10	1:39:11 AM	SiCl4 post valve closed
2/5/10	1:39:11 AM	Main Vac valve closed
2/5/10	1:39:11 AM	Bypass valve closed
2/5/10	1:39:11 AM	Bubbler valve closed
2/5/10	1:39:11 AM	Helium MFC set to  0.000000
2/5/10	1:39:11 AM	H2 MFC set to  0.000000
2/5/10	1:39:11 AM	BCl3 MFC set to  0.000000
2/5/10	1:39:11 AM	PHl3 MFC set to  0.000000
2/5/10	1:39:11 AM	SiCl4 MFC set to  0.000000
2/5/10	1:39:11 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:39:11 AM	Tube furnace set to 0
2/5/10	1:39:11 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:39:11 AM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-04:tasks:vent.xml
2/5/10	1:39:27 AM	Program exited cleanly
2/5/10	1:39:29 AM	Program started normally
2/5/10	1:41:23 AM	Bypass solenoid MFC set to  760.000000
2/5/10	1:41:27 AM	Bypass solenoid MFC set to  760.000000
2/5/10	1:41:32 AM	Helium MFC set to  500.000000
2/5/10	1:41:39 AM	SiCl4 post valve opened
2/5/10	1:41:40 AM	SiCl4 post valve closed
2/5/10	1:41:43 AM	Program exited cleanly
2/5/10	1:45:26 AM	Program started normally
2/5/10	1:45:30 AM	Helium MFC set to  500.000000
2/5/10	1:45:38 AM	Helium MFC set to  499.900000
2/5/10	1:45:44 AM	Helium MFC set to  500.000000
2/5/10	1:45:48 AM	Bypass solenoid MFC set to  10.000000
2/5/10	1:46:20 AM	Program exited cleanly
2/5/10	1:49:27 AM	Program started normally
2/5/10	1:49:47 AM	Recipe started at 1:49 AM
2/5/10	1:49:47 AM	Helium valve closed
2/5/10	1:49:47 AM	H2 valve closed
2/5/10	1:49:47 AM	BCl3 valve closed
2/5/10	1:49:47 AM	SiCl4 pre valve closed
2/5/10	1:49:47 AM	SiCl4 post valve closed
2/5/10	1:49:47 AM	Main Vac valve closed
2/5/10	1:49:47 AM	Bypass valve closed
2/5/10	1:49:47 AM	Bubbler valve closed
2/5/10	1:49:47 AM	PH3 valve opened
2/5/10	1:49:47 AM	Helium MFC set to  0.000000
2/5/10	1:49:47 AM	H2 MFC set to  0.000000
2/5/10	1:49:47 AM	BCl3 MFC set to  3.000000
2/5/10	1:49:47 AM	PHl3 MFC set to  0.000000
2/5/10	1:49:47 AM	SiCl4 MFC set to  0.000000
2/5/10	1:49:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:49:47 AM	Tube furnace set to 0
2/5/10	1:49:47 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:49:48 AM	Helium valve closed
2/5/10	1:49:48 AM	H2 valve closed
2/5/10	1:49:48 AM	BCl3 valve closed
2/5/10	1:49:48 AM	SiCl4 pre valve closed
2/5/10	1:49:48 AM	SiCl4 post valve closed
2/5/10	1:49:48 AM	Main Vac valve closed
2/5/10	1:49:48 AM	Bypass valve closed
2/5/10	1:49:48 AM	Bubbler valve closed
2/5/10	1:49:48 AM	PH3 valve opened
2/5/10	1:49:48 AM	Helium MFC set to  0.000000
2/5/10	1:49:48 AM	H2 MFC set to  0.000000
2/5/10	1:49:48 AM	BCl3 MFC set to  1.000000
2/5/10	1:49:48 AM	PHl3 MFC set to  0.000000
2/5/10	1:49:48 AM	SiCl4 MFC set to  0.000000
2/5/10	1:49:48 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:49:48 AM	Tube furnace set to 0
2/5/10	1:49:48 AM	Bypass solenoid MFC set to  0.000000
2/5/10	1:49:49 AM	Run finished at 1:49 AM
2/5/10	11:22:08 AM	Program started after a nonstandard shutdown
2/5/10	11:22:54 AM	Program exited cleanly
2/5/10	11:22:56 AM	Program started normally
2/5/10	11:22:59 AM	Helium valve opened
2/5/10	11:23:00 AM	Helium valve closed
2/5/10	11:23:01 AM	SiCl4 post valve opened
2/5/10	11:23:01 AM	SiCl4 post valve closed
2/5/10	11:23:41 AM	Program exited cleanly
2/5/10	11:38:36 AM	Program started normally
2/5/10	11:39:42 AM	Program exited cleanly
2/5/10	11:41:05 AM	Program started normally
2/5/10	11:41:09 AM	Program exited cleanly
2/5/10	11:47:40 AM	Program started normally
2/5/10	11:47:45 AM	Program exited cleanly
2/5/10	11:52:43 AM	Program started normally
2/5/10	11:52:59 AM	Program exited cleanly
2/5/10	11:54:08 AM	Program started normally
2/5/10	11:54:13 AM	Program exited cleanly
2/5/10	11:55:59 AM	Program started normally
2/5/10	11:56:34 AM	Program exited cleanly
2/5/10	12:06:43 PM	Program started normally
2/5/10	12:06:49 PM	Program exited cleanly
2/5/10	12:20:41 PM	Program started normally
2/5/10	12:21:03 PM	Helium valve opened
2/5/10	12:21:04 PM	SiCl4 pre valve opened
2/5/10	12:21:05 PM	PH3 valve opened
2/5/10	12:21:06 PM	Bypass valve opened
2/5/10	12:22:28 PM	PH3 valve closed
2/5/10	12:22:29 PM	Helium valve closed
2/5/10	12:22:30 PM	SiCl4 pre valve closed
2/5/10	12:22:32 PM	Bypass valve closed
2/5/10	12:22:40 PM	PH3 valve opened
2/5/10	12:22:40 PM	H2 valve opened
2/5/10	12:22:41 PM	SiCl4 pre valve opened
2/5/10	12:22:42 PM	Bypass valve opened
2/5/10	12:23:06 PM	Program exited cleanly
2/5/10	12:39:56 PM	Program started normally
2/5/10	12:40:46 PM	Program exited cleanly
2/5/10	12:42:12 PM	Program started normally
2/5/10	12:43:00 PM	Program exited cleanly
2/5/10	12:45:08 PM	Program started normally
2/5/10	12:45:29 PM	Program exited cleanly
2/5/10	12:46:02 PM	Program started normally
2/5/10	12:46:42 PM	Program exited cleanly
2/5/10	12:47:20 PM	Program started normally
2/5/10	12:49:19 PM	Program exited cleanly
2/5/10	12:58:31 PM	Program started normally
2/5/10	12:58:46 PM	Program exited cleanly
2/5/10	12:59:18 PM	Program started normally
2/5/10	1:02:47 PM	Program exited cleanly
2/5/10	1:02:49 PM	Program started normally
2/5/10	1:03:08 PM	Program exited cleanly
2/5/10	1:03:30 PM	Program started normally
2/5/10	1:03:37 PM	Program exited cleanly
2/5/10	1:04:06 PM	Program started normally
2/5/10	1:04:33 PM	Program exited cleanly
2/5/10	1:04:48 PM	Program started normally
2/5/10	1:05:01 PM	PH3 valve opened
2/5/10	1:05:03 PM	SiCl4 post valve opened
2/5/10	1:05:04 PM	Bubbler valve opened
2/5/10	1:05:22 PM	Helium MFC set to  500.000000
2/5/10	1:06:49 PM	Program exited cleanly
2/5/10	1:18:52 PM	Program started normally
2/5/10	1:19:19 PM	Program exited cleanly
2/5/10	1:19:21 PM	Program started normally
2/5/10	1:19:25 PM	Program exited cleanly
2/5/10	1:20:15 PM	Program started normally
2/5/10	1:20:46 PM	Recipe started at 1:20 PM
2/5/10	1:20:47 PM	H2 valve closed
2/5/10	1:20:47 PM	BCl3 valve closed
2/5/10	1:20:47 PM	SiCl4 pre valve closed
2/5/10	1:20:47 PM	Main Vac valve closed
2/5/10	1:20:47 PM	Bubbler valve closed
2/5/10	1:20:47 PM	Helium valve opened
2/5/10	1:20:47 PM	PH3 valve opened
2/5/10	1:20:47 PM	SiCl4 post valve opened
2/5/10	1:20:47 PM	Bypass valve opened
2/5/10	1:20:47 PM	Helium MFC set to  0.000000
2/5/10	1:20:47 PM	H2 MFC set to  0.000000
2/5/10	1:20:47 PM	BCl3 MFC set to  0.000000
2/5/10	1:20:47 PM	PHl3 MFC set to  0.000000
2/5/10	1:20:47 PM	SiCl4 MFC set to  0.000000
2/5/10	1:20:47 PM	Bypass solenoid MFC set to  0.000000
2/5/10	1:20:47 PM	Tube furnace set to 0
2/5/10	1:20:47 PM	Bypass solenoid MFC set to  0.000000
2/5/10	1:21:17 PM	Helium valve closed
2/5/10	1:21:17 PM	PH3 valve closed
2/5/10	1:21:17 PM	SiCl4 post valve closed
2/5/10	1:21:17 PM	Main Vac valve closed
2/5/10	1:21:17 PM	Bypass valve closed
2/5/10	1:21:17 PM	H2 valve opened
2/5/10	1:21:17 PM	BCl3 valve opened
2/5/10	1:21:17 PM	SiCl4 pre valve opened
2/5/10	1:21:17 PM	Bubbler valve opened
2/5/10	1:21:17 PM	Helium MFC set to  0.000000
2/5/10	1:21:17 PM	H2 MFC set to  0.000000
2/5/10	1:21:17 PM	BCl3 MFC set to  0.000000
2/5/10	1:21:17 PM	PHl3 MFC set to  0.000000
2/5/10	1:21:17 PM	SiCl4 MFC set to  0.000000
2/5/10	1:21:17 PM	Bypass solenoid MFC set to  0.000000
2/5/10	1:21:17 PM	Tube furnace set to 0
2/5/10	1:21:17 PM	Bypass solenoid MFC set to  0.000000
2/5/10	1:21:33 PM	Run finished at 1:21 PM
2/5/10	1:22:35 PM	Program exited cleanly
2/5/10	1:22:58 PM	Program started normally
2/5/10	1:23:18 PM	PH3 valve opened
2/5/10	1:23:19 PM	BCl3 valve opened
2/5/10	1:23:19 PM	SiCl4 pre valve opened
2/5/10	1:23:20 PM	SiCl4 post valve opened
2/5/10	1:23:30 PM	Program exited cleanly
2/5/10	1:39:34 PM	Program started normally
2/5/10	1:39:35 PM	BCl3 valve opened
2/5/10	1:39:36 PM	SiCl4 post valve opened
2/5/10	1:39:37 PM	Bubbler valve opened
2/5/10	5:15:33 PM	Program exited cleanly
2/5/10	6:03:29 PM	Program started normally
2/5/10	6:03:54 PM	Program started after a nonstandard shutdown
2/5/10	6:04:04 PM	Program exited cleanly
2/5/10	6:05:04 PM	Program started normally
2/5/10	6:05:08 PM	Program exited cleanly
2/5/10	6:06:08 PM	Program started normally
2/5/10	6:06:10 PM	PH3 valve opened
2/5/10	6:06:16 PM	PHl3 MFC set to  2.000000
2/5/10	6:06:19 PM	BCl3 MFC set to  3.000000
2/5/10	6:06:21 PM	H2 valve opened
2/5/10	6:06:21 PM	BCl3 valve opened
2/5/10	6:06:24 PM	H2 MFC set to  1.000000
2/5/10	6:06:30 PM	BCl3 MFC set to  3.210000
2/5/10	6:06:36 PM	Helium MFC set to  500.000000
2/5/10	6:06:42 PM	Tube furnace set to 500
2/5/10	6:06:56 PM	Bypass solenoid MFC set to  760.000000
2/5/10	6:06:59 PM	Bypass valve opened
2/5/10	6:06:59 PM	Main Vac valve opened
2/5/10	6:07:03 PM	SiCl4 post valve opened
2/5/10	6:07:04 PM	SiCl4 pre valve opened
2/5/10	6:07:05 PM	Helium valve opened
2/5/10	6:07:32 PM	Program exited cleanly
